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                • · 型 号:AI-LM-(DIAMETER)RA-(HEIGHT)

                产品概述

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                主要用于晶圆切割╳和其它需要小角度调整的工否则艺等。


                行程: 0-15 Degrees
                电机: Ironless Core Linear Motor
                反馈: Non-Contact Optical Encoder
                分辨率: 1Vp-p Analog Output (see specifications)
                             Digital Output Options: (see specifications)
                振摆: Axial: < 25 um Available (see specifications)
                             Radial: < 25 um Available (see specifications)
                传感器: Integrated Home and End of Travel Limits
                Bearings: Angular Contact (Duplex Pair)
                Cables: High Flex, 10M Cycle, 3m Length
                Structure: Anodized Aluminum 6061-T6
                           Optional: Stainless Steel
                环境: Standard
                           Optional: Clean Room and Vacuum (10-7 Torr)
                温度环境: 0°C to 50°C
                湿度: 10% to 80% Non-Condensing
                精度: 6-D Nano PrecisionTM Test Methods